X-ray Diffractometer (XRD)
PANalytical X’Pert Pro MRD diffraction system
High resolution X-ray diffractometer with horizontal scattering plane is dedicated to thin film analysis using standard Bragg-Brentano setup or grazing incidence techniques using parallel beam provided by X-ray parabolic mirror. 5-axis Euler cradle allows texture pole figures and sin2psi stress measurements. PIXcel 3D area detector increases speed of detector scanning. Domed hot stage Anton Paar DHS 1100 allows in-situ measurements up to 1100°C.
Specification
X-ray source
static anode 1.8kW CuK_alpha with changeable line(LFF)/point focus
Horizontal high resolution goniometer
omega -20°...120° / min.step 0.0001°
2theta -40°...170° / min.step 0.0001°
Pre-adjusted modular system PreFIX
cross-slit colliamtor, fixed slits collimator, parabolic mirror, Bartels 4xGe 022 monochromator, parallel plate collimator, monocapillary dia,0.3mm, receiving slit - triple axis analyser module
5-axis Euler cradle
tilt -90°...90° / min.step 0.01°
azimuth -360°...360° / min.step 0.01°
x,y +/-50 mm / min.step 0.01 mm
z 0.. 11 mm / min.step 0.001 mm
Measurement types
Bragg-Brfentano, grazing incidence XRD, X-ray reflectivity, reciprocal space mapping, texture, stress, in-plane diffraction
PIXcel 3D solid state area detector
255 x 255 pixels, 14 x 14 mm, pixel: 55x55 um
linearity: 50 kcps/pixel, 12.8 Mcps / strip
scanning (and static) modes: 0D, 1D, 2D
Domed hot stage Anton Paar DHS 1100
temp. range: RT up to 1100°C
cooling by CDA
holder design and graphite dome allows Euler cradle usage
ambient pressure or low vacuum
inert gases, N2, O2, air
ramp up max.: 500°C/min
SW
XPert Refelctivity, HighScore+, XPert Epitaxy, Xpert Texture
